Ion-beam accelerator ILU-3 
XPS Analysis Sub-System 
Bruker D8 Advanced diffractometer 
Bruker-BER-418S EPR spectrometer 
Quantum Design PPMS-9 
Bruker DektakXT profilometer 
Scanning electron microscope Carl Zeiss Evo 50 XVP 
Femtosecond laser setup 
Confocal microscopy of submicron resolution 
Bruker-ELEXSYS E580 EPR spectrometer 
Bruker-ELEXSYS E680X EPR spectrometer 
Diamond anvill cell 
CVD reactor with a multimode microwave cavity 
CVD reactor for growth of doped CVD diamond 
Experimental setup for studying coherent and interference effects
| Ion-beam accelerator ILU-3 | |
| XPS Analysis Sub-System | |
| Bruker D8 Advanced diffractometer | |
| Bruker-BER-418S EPR spectrometer | |
| Quantum Design PPMS-9 | |
| Bruker DektakXT profilometer | |
| Scanning electron microscope Carl Zeiss Evo 50 XVP | |
| Femtosecond laser setup | |
| Confocal microscopy of submicron resolution | |
| Bruker-ELEXSYS E580 EPR spectrometer | |
| Bruker-ELEXSYS E680X EPR spectrometer | |
| Diamond anvill cell | |
| CVD reactor with a multimode microwave cavity | |
| CVD reactor for growth of doped CVD diamond | |
| Experimental setup for studying coherent and interference effects |